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Domestic 8-inch R&D pilot line process capability layout
On September 10th, during the opening ceremony of the 2017 China (Shanghai) International Sensor Technology and Application Exhibition (SENSOR CHINA) and the Global Sensor and Internet of Things Industry Summit in Asia, a major event brought together leading experts and industry figures. Among the attendees were Wang Xue, Vice Chairman of the Chinese Association for Science and Technology and an academician of the Chinese Academy of Sciences; Yang Xueshan, former Deputy Minister of the Ministry of Industry and Information Technology; Ding Wenwu, General Manager of the National Integrated Circuit Industry Investment Fund and Chairman of the China High-end Chip Alliance; Wu Shengwu, Director of the Electronics Department at the Ministry of Industry and Information Technology; Shou Ziqi, Director of the Shanghai Science and Technology Committee; and Ma Chunlei, Secretary of the Shanghai Jiading District Party Committee. Together, they officially launched the "Beyond Moore" R&D pilot line at the Shanghai Micro-Technology Industry Research Institute (SITRI). This marked a significant step forward in China's efforts to lead in next-generation sensor and IoT technologies.
The pilot line, which is the first domestically developed and world-leading 8-inch CMOS-compatible R&D facility, aims to accelerate the development of "Beyond Moore" technology and drive innovation in the Internet of Things. With the rise of mobile internet, IoT, cloud computing, big data, and AI, the era of an intelligent "Internet of Everything" is approaching. At the heart of this transformation lies "Beyond Moore" technology, which focuses on sensors and integrates various technologies such as RF, power, and micro-energy—key enablers for future smart interconnection.
Despite strong theoretical research and accumulated experience in China, the gap between R&D and industrial application remains a challenge. The development of MEMS products involves a long and non-standard technology chain, making it highly dependent on production lines. A successful pilot test is crucial, with only about 30% of projects reaching industrialization without one. Recognizing this, SITRI has established a state-of-the-art 8-inch R&D pilot line in Shanghai’s Jiading Industrial Zone, equipped with advanced micro-nano processing capabilities and integrated with international fabrication facilities.
This facility not only bridges the gap between R&D and mass production but also enriches the domestic "Beyond Moore" ecosystem. It supports the development of new processes, materials, and devices, including MEMS, silicon photonics, RF, 3D integration, and more. Beyond technical development, SITRI provides comprehensive services such as product development, small-batch manufacturing, training, and equipment verification, significantly improving R&D success rates.
SITRI is also building a full-service platform that integrates R&D, engineering, marketing, and incubation. It collaborates with global partners, establishes branches in Silicon Valley, Grenoble, and Hsinchu, and launches investment funds to support startups. Through these initiatives, SITRI is creating a robust innovation ecosystem that drives technological advancement and industrial growth in the "Beyond Moore" space.
As a global collaborative innovation center, SITRI continues to strengthen its partnerships with domestic and international institutions, aiming to accelerate the commercialization of cutting-edge technologies and establish a thriving IoT and sensor industry in China.